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Development of Low-Temperature Crystallization Process for TiNi Alloy Film by Sputtering Deposition Simultaneously with Ion Irradiation

Noriaki Ikenaga and Noriyuki Sakudo
IEEJ Transactions on Sensors and Micromachines 133 (10) B297 (2013)
DOI: 10.1541/ieejsmas.133.B297
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Synthesis of Crystallized TiNi Films by Ion Irradiation

Noriaki Ikenaga, Yoichi Kishi, Zenjiro Yajima and Noriyuki Sakudo
Advances in Science and Technology 78 87 (2012)
DOI: 10.4028/
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Low Temperature Crystallization of Sputter-Deposited TiNi Films

Yoichi Kishi, Noriaki Ikenaga, Noriyuki Sakudo and Zenjiro Yajima
Advances in Science and Technology 78 81 (2012)
DOI: 10.4028/
See this article