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Cited article:

Development of Low-Temperature Crystallization Process for TiNi Alloy Film by Sputtering Deposition Simultaneously with Ion Irradiation

Noriaki Ikenaga and Noriyuki Sakudo
IEEJ Transactions on Sensors and Micromachines 133 (10) B297 (2013)
https://doi.org/10.1541/ieejsmas.133.B297